DocumentCode

1095711

Title

VIB-3 Performance of GaAs MESFET´s directly ion implanted on gettered substrates

Author

Bujatti, M. ; Miller, David ; Morgan, D. ; Patterson, G.

Volume

31

Issue

12

fYear

1984

fDate

12/1/1984 12:00:00 AM

Firstpage

1986

Lastpage

1987

Keywords

Electromagnetic heating; Etching; FETs; Gallium arsenide; Gettering; MESFETs; Marine technology; Microwave devices; Substrates; Transconductance;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1984.21891

Filename

1484176