DocumentCode :
1095711
Title :
VIB-3 Performance of GaAs MESFET´s directly ion implanted on gettered substrates
Author :
Bujatti, M. ; Miller, David ; Morgan, D. ; Patterson, G.
Volume :
31
Issue :
12
fYear :
1984
fDate :
12/1/1984 12:00:00 AM
Firstpage :
1986
Lastpage :
1987
Keywords :
Electromagnetic heating; Etching; FETs; Gallium arsenide; Gettering; MESFETs; Marine technology; Microwave devices; Substrates; Transconductance;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1984.21891
Filename :
1484176
Link To Document :
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