Title :
VIB-3 Performance of GaAs MESFET´s directly ion implanted on gettered substrates
Author :
Bujatti, M. ; Miller, David ; Morgan, D. ; Patterson, G.
fDate :
12/1/1984 12:00:00 AM
Keywords :
Electromagnetic heating; Etching; FETs; Gallium arsenide; Gettering; MESFETs; Marine technology; Microwave devices; Substrates; Transconductance;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1984.21891