DocumentCode
1095884
Title
Double-implanted GaAs complementary JFET´s
Author
Zuleeg, R. ; Notthoff, J.K. ; Troeger, G.L.
Author_Institution
McDonnell Douglas Microelectronics Center, Huntington Beach, CA
Volume
5
Issue
1
fYear
1984
fDate
1/1/1984 12:00:00 AM
Firstpage
21
Lastpage
23
Abstract
The fabrication and performance characteristics of double-implanted GaAs complementary junction field-effect transistors (JFET´s) suitable for low-power digital integrated circuit applications are described. Effective mobilities for the n-channel enhancement-mode JFET are 3500 cm2/V.s and for the p-channel 300 cm2/V.s. Experimental results of an ultra-low-power static RAM are presented.
Keywords
Delay effects; Dielectrics; FETs; Gallium arsenide; Implants; MESFETs; Power dissipation; Random access memory; Read-write memory; Threshold voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25817
Filename
1484193
Link To Document