DocumentCode
1097144
Title
An 800-MHz insulated gate buried-channel CCD on InP
Author
Lile, D.L. ; Collins, D.A.
Author_Institution
Colorado State University, Fort Collins, CO
Volume
5
Issue
8
fYear
1984
fDate
8/1/1984 12:00:00 AM
Firstpage
335
Lastpage
337
Abstract
Buried-channel insulated gate CCD´s have been fabricated on semi-insulating InP using a planar ion-implantation process. These 10- µm gate-length devices, exercised with sinusoidal clocks, have operated to a measurement-limited upper frequency of 800 MHz.
Keywords
Charge coupled devices; Charge transfer; Clocks; Dielectric materials; Frequency measurement; Gallium arsenide; Indium phosphide; Insulation; Neodymium; Sea measurements;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25936
Filename
1484312
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