Title :
Comments on "Determining specific contact resistivity from contact end resistance measurements"
Author :
Mazer, J.A. ; Linholm, L.W.
Author_Institution :
National Bureau of Standards, Washington, DC
Keywords :
Aluminum; Conductivity; Contact resistance; Electrical resistance measurement; Measurement errors; Metallization; Proximity effect; Size measurement; Testing; Transmission lines;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25941
