DocumentCode
1097195
Title
Comments on "Determining specific contact resistivity from contact end resistance measurements"
Author
Mazer, J.A. ; Linholm, L.W.
Author_Institution
National Bureau of Standards, Washington, DC
Volume
5
Issue
9
fYear
1984
Firstpage
347
Lastpage
348
Keywords
Aluminum; Conductivity; Contact resistance; Electrical resistance measurement; Measurement errors; Metallization; Proximity effect; Size measurement; Testing; Transmission lines;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25941
Filename
1484317
Link To Document