Title :
A low-power programming technique for polysilicon fuses
Author :
Lu, C.Y. ; Lu, N.C.-C. ; Shih, C.-C.
Author_Institution :
AT&T Bell Laboratories, Reading, PA
fDate :
10/1/1984 12:00:00 AM
Abstract :
A new programming technique for polysilicon resistor fuses using low input electrical power has been demonstrated. In contrast to the conventional technique which programs fuses in the air at atmospheric pressure, the new technique is to program fuses in a low-pressure gas ambient. Removal of the entire passivation layers over the fuses is not necessary thus avoiding the contamination problem.
Keywords :
Atmosphere; Contamination; Degradation; Driver circuits; Fuses; Glass; Passivation; Resistors; Silicon; Voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25960
