DocumentCode
1097425
Title
A buried-cap planar stripe (BCP) GaAlAs laser with ZnSe current-confinement region by MBE
Author
Niina, Tatsuhiko ; Yamaguchi, Takao ; Yodoshi, Keiichi ; Yagi, Katsumi ; Hamada, Hiroki
Author_Institution
Res. Center, Sanyo Electric Co., Ltd., Osaka, Japan
Volume
19
Issue
6
fYear
1983
fDate
6/1/1983 12:00:00 AM
Firstpage
1021
Lastpage
1025
Abstract
A GaAlAs visible laser with a novel structure, called a buried-cap planar (BCP) stripe laser, has been developed. It has an epitaxial ZnSe semiinsulating layer grown by molecular beam epitaxy (MBE) on a cladding layer, leaving a narrow stripe for the current confinement. In this laser a reflective index waveguide is constructed by using a channeled substrate, and the current flow is confined by growing the semi-insulating ZnSe single crystal on the cladding layer after mesa etching the cap layer. There are many advantages in this structure: the diffusion process is not necessary, the current confinement is complete, and the thermal strains and misfit dislocations can be avoided. These advantages assure a highly reliable device performance, and a high-yield fabrication process.
Keywords
Aluminum materials/devices; Epitaxial growth; Gallium materials/lasers; Visible lasers; Zinc materials/devices; Business continuity; Etching; Laser modes; Molecular beam epitaxial growth; Optical device fabrication; P-n junctions; Semiconductor lasers; Substrates; Waveguide lasers; Zinc compounds;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1983.1071971
Filename
1071971
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