DocumentCode
1098688
Title
Small-radii curved rib waveguides in GaAs/GaAlAs using electron-beam lithography
Author
Austin, Michael W. ; Flavin, Philip G.
Author_Institution
Royal Melbourne Institute of Technology, Victoria, Australia
Volume
1
Issue
1
fYear
1983
fDate
3/1/1983 12:00:00 AM
Firstpage
236
Lastpage
240
Abstract
Small-radii curved optical waveguides have been fabricated in GaAs/GaAlAs using electron-beam lithography. Ion-beam milling was used as an isotropic etch. The insertion loss of these devices was limited not by bending loss but by input coupling and scattering loss from rib-wall imperfections. A minimum combined bending and scattering loss of 0.6 dB/rad was measured for a 2-μm-wide monomode guide with a radius of 300 μm.
Keywords
Electron radiation effects/protection; Gallium materials/devices; Optical waveguides; Gallium arsenide; Insertion loss; Laboratories; Lithography; Optical devices; Optical losses; Optical scattering; Optical sensors; Optical signal processing; Optical waveguides;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/JLT.1983.1072088
Filename
1072088
Link To Document