• DocumentCode
    1100375
  • Title

    Quartz versus PBN—The effect of crucible type on undoped LEC GaAS

  • Author

    Chang, James S.C. ; McCall, David E. ; Wong, Edward H.

  • Author_Institution
    Hewlett-Packard Company, Santa Rosa, CA
  • Volume
    32
  • Issue
    6
  • fYear
    1985
  • fDate
    6/1/1985 12:00:00 AM
  • Firstpage
    1124
  • Lastpage
    1129
  • Abstract
    Undoped semi-insulating GaAs crystals were grown in a low pressure LEC system using quartz and pyrolytic boron nitride (PBN) crucibles. Crystals grown in PBN crucibles are consistently semi-insulating from the seed end to the tail end. Crystals grown in quartz crucibles have lower Hall mobility. Other properties such as dislocation etch-pit of conductive material beginning from the seed end of the crystal, and have lower Hall mobility. Other properties such as dislocation etch-put density, implant profile, and thermal conversion characteristics of the two types of crystal are about the same.
  • Keywords
    Automatic control; Boron; Crystalline materials; Crystals; Etching; Gallium arsenide; Hall effect; Ion implantation; Shafts; Valves;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1985.22084
  • Filename
    1484830