DocumentCode
1100375
Title
Quartz versus PBN—The effect of crucible type on undoped LEC GaAS
Author
Chang, James S.C. ; McCall, David E. ; Wong, Edward H.
Author_Institution
Hewlett-Packard Company, Santa Rosa, CA
Volume
32
Issue
6
fYear
1985
fDate
6/1/1985 12:00:00 AM
Firstpage
1124
Lastpage
1129
Abstract
Undoped semi-insulating GaAs crystals were grown in a low pressure LEC system using quartz and pyrolytic boron nitride (PBN) crucibles. Crystals grown in PBN crucibles are consistently semi-insulating from the seed end to the tail end. Crystals grown in quartz crucibles have lower Hall mobility. Other properties such as dislocation etch-pit of conductive material beginning from the seed end of the crystal, and have lower Hall mobility. Other properties such as dislocation etch-put density, implant profile, and thermal conversion characteristics of the two types of crystal are about the same.
Keywords
Automatic control; Boron; Crystalline materials; Crystals; Etching; Gallium arsenide; Hall effect; Ion implantation; Shafts; Valves;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1985.22084
Filename
1484830
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