Theoretical considerations in the design of integrated semiconductor sensors applying electrets

The usefulness of permanently charged electrets in realizing condenser microphones is well known; however, to date they have hardly been applied in integrated semiconductor sensors. The results of investigations to apply electrets in semiconductor sensors are presented in this paper. Conditions are determined for their use in integrated microphone applications as well as for realizing an electret pressure sensor. The first experimental results of the latter use are presented and appear to be very promising.