Title :
Structure in RF Hydrogen Plasma Induced by Magnetic Field
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
Images of the spatial structure of a capacitively coupled hydrogen discharge are presented for various strengths of applied magnetic field. With increasing magnetic field, we find that not only does the distribution of emission change because of the confinement of the electrons by the magnetic field, but we also find "dark-bands" regions that form in the discharge. By using narrowband interference filters (~10 nm bandwidth), we examine how the relative optical emission centered on Halpha and Hbeta (with respect to the total optical emission) change with the applied magnetic field.
Keywords :
high-frequency discharges; hydrogen; interference filters; plasma diagnostics; plasma properties; H; RF hydrogen plasma; capacitively coupled hydrogen discharge; electron confinement; emission distribution; frequency 13.56 MHz; magnetic field; narrowband interference filters; optical emission; power 75 W; pressure 25 mtorr; spatial structure; wavelength 486 nm; wavelength 656 nm; Double layer; hydrogen plasma; magnetic field; radio frequency discharge;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.917788
