• DocumentCode
    1100723
  • Title

    Structure in RF Hydrogen Plasma Induced by Magnetic Field

  • Author

    Barnat, E.V.

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    1362
  • Lastpage
    1363
  • Abstract
    Images of the spatial structure of a capacitively coupled hydrogen discharge are presented for various strengths of applied magnetic field. With increasing magnetic field, we find that not only does the distribution of emission change because of the confinement of the electrons by the magnetic field, but we also find "dark-bands" regions that form in the discharge. By using narrowband interference filters (~10 nm bandwidth), we examine how the relative optical emission centered on Halpha and Hbeta (with respect to the total optical emission) change with the applied magnetic field.
  • Keywords
    high-frequency discharges; hydrogen; interference filters; plasma diagnostics; plasma properties; H; RF hydrogen plasma; capacitively coupled hydrogen discharge; electron confinement; emission distribution; frequency 13.56 MHz; magnetic field; narrowband interference filters; optical emission; power 75 W; pressure 25 mtorr; spatial structure; wavelength 486 nm; wavelength 656 nm; Double layer; hydrogen plasma; magnetic field; radio frequency discharge;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.917788
  • Filename
    4471974