• DocumentCode
    1101716
  • Title

    Selfaligned integrated silica on silicon waveguide-photodiode interface

  • Author

    Crookes, C.G. ; Croston, I.R. ; Pescod, C.R.

  • Author_Institution
    GEC-Marconi Res. Centre, Great Baddow
  • Volume
    30
  • Issue
    12
  • fYear
    1994
  • fDate
    6/9/1994 12:00:00 AM
  • Firstpage
    1002
  • Lastpage
    1003
  • Abstract
    The authors report the demonstration of planar, doped silica waveguides integrated with rear-illuminated InGaAs/InP photodiodes for use in compact, singlemode, optoelectronic hybrid modules. The photodiodes are assembled with the waveguides using a selfaligned technique giving a mean excess loss of 0.9 dB at 1.3 μm and a 3 dB bandwidth of 1.5 GHz
  • Keywords
    integrated optoelectronics; optical waveguides; photodiodes; silicon; silicon compounds; 0.9 dB; 1.3 micron; 1.5 GHz; InGaAs-InP; SiO2 on Si structure; SiO2-Si; integrated waveguide-photodiode interface; planar doped silica waveguides; rear-illuminated photodiodes; selfaligned technique; singlemode optoelectronic hybrid modules;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19940662
  • Filename
    293095
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1101716