Photolithographically patterned thin-film multilayer devices of YBa 2Cu3O7-x

Thin-film YBa₂Cu₃O_7-x-SrTiO₃ -YBa₂Cu₃O_7-x multilayer interconnect structures in which each in situ laser-deposited film is independently patterned by photolithography have been fabricated. The two key components necessary for a superconducting multilayer interconnect technology have been constructed: crossovers and window contacts. As a further demonstration of the technology, the authors have fabricated a thin-film flux transformer which is suitable for use with a superconducting quantum interference device (SQUID) and includes a ten-turn input coil with 6-μm linewidth. Transport measurements showed that the critical temperature was 87 K and the critical current was 135 μA at 82 K