• DocumentCode
    1101783
  • Title

    Laser photoelectron sources of high apparent brightness

  • Author

    Massey, Gail A.

  • Author_Institution
    San Diego State University, San Diego, CA, USA
  • Volume
    20
  • Issue
    2
  • fYear
    1984
  • fDate
    2/1/1984 12:00:00 AM
  • Firstpage
    103
  • Lastpage
    105
  • Abstract
    By focusing an ultraviolet laser beam to a small spot on an appropriately shaped cathode, one can obtain photoelectron beams of 106A . cm-1. sr-1brightness. Such a continuous electron source may be useful in electron beam lithography and other applications. Calculations of current densities, brightness, and emitter temperature rises are presented.
  • Keywords
    Integrated circuit fabrication; Laser applications; Photoemitting materials/devices; Ultraviolet radiation effects; Brightness; Cathodes; Electron beams; Electron optics; Laser modes; Optical filters; Optical interferometry; Ring lasers; Semiconductor lasers; Surface emitting lasers;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1984.1072365
  • Filename
    1072365
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1101783