DocumentCode :
1101783
Title :
Laser photoelectron sources of high apparent brightness
Author :
Massey, Gail A.
Author_Institution :
San Diego State University, San Diego, CA, USA
Volume :
20
Issue :
2
fYear :
1984
fDate :
2/1/1984 12:00:00 AM
Firstpage :
103
Lastpage :
105
Abstract :
By focusing an ultraviolet laser beam to a small spot on an appropriately shaped cathode, one can obtain photoelectron beams of 106A . cm-1. sr-1brightness. Such a continuous electron source may be useful in electron beam lithography and other applications. Calculations of current densities, brightness, and emitter temperature rises are presented.
Keywords :
Integrated circuit fabrication; Laser applications; Photoemitting materials/devices; Ultraviolet radiation effects; Brightness; Cathodes; Electron beams; Electron optics; Laser modes; Optical filters; Optical interferometry; Ring lasers; Semiconductor lasers; Surface emitting lasers;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/JQE.1984.1072365
Filename :
1072365
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1101783
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