Title :
A New High-Frequency Surface Acoustic Wave Sensor for Humidity Measurement
Author :
Kawalec, Adam ; Pasternak, Mateusz
Author_Institution :
Dept. of Electron., Mil. Univ. of Technol., Warsaw
Abstract :
The relative humidity sensor based on the high-frequency surface acoustic wave (SAW) resonator has been presented in this paper. In the device, a two-port SAW resonator with Nafion coating was used. To increase the sensitivity of the sensor, the higher resonator harmonics have been employed. The sensor exhibits a very high sensitivity and linearity as well as relatively short response time. Due to the Nafion properties, it is extremely resistant to chemical compound interactions, e.g., it can operate in the atmosphere with sulfur dioxide, acidic and alkaline vapors, strong oxidizing agents, and dust.
Keywords :
humidity measurement; humidity sensors; surface acoustic wave resonators; surface acoustic wave sensors; Nafion coating; SAW resonator; acidic vapors; dust; high-frequency surface acoustic wave sensor; humidity measurement; oxidizing agents; resonator harmonics; sulfur dioxide; Harmonic oscillators; relative humidity (RH) sensors; surface acoustic wave (SAW) gas sensors;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2008.917255
