Title :
Numerical conformal mapping for treatment of geometry problems in process simulation
Author :
Seidl, Albert ; Svoboda, Milos
Author_Institution :
Institute für Festkörpertechnologie, Munich, Germany
fDate :
10/1/1985 12:00:00 AM
Abstract :
In semiconductor modeling, partial differential equations often have to be solved on a domain with a curved boundary. A numerical conformal mapping well suited for process modeling problems is presented. Its use in connection with a moving boundary is explained.
Keywords :
Boundary conditions; Closed-form solution; Conformal mapping; Finite element methods; Geometry; Mesh generation; Partial differential equations; Shape; Solid modeling; Switches;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1985.22228
