DocumentCode
1102266
Title
Buried refractive microlenses formed by selective oxidation of AlGaAs
Author
Blum, O. ; Lear, K.L. ; Hou, H.Q. ; Warren, M.E.
Author_Institution
Sandia Nat. Labs., Albuquerque, NM, USA
Volume
32
Issue
15
fYear
1996
fDate
7/18/1996 12:00:00 AM
Firstpage
1406
Lastpage
1408
Abstract
The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980 nm, and modelled theoretically
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; laser accessories; lenses; oxidation; semiconductor lasers; surface emitting lasers; 980 nm; AlGaAs-GaAs; VCSELs; buried refractive microlenses; lens-shaped oxidation shape; mole fraction; selective oxidation; vertical direction;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19960887
Filename
511149
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