Title :
IIB-5 ultrashallow p+-n junctions suitable for VLSI CMOS
fDate :
11/1/1985 12:00:00 AM
Keywords :
Boron; Fabrication; Gas lasers; Implants; Ion implantation; Resists; Surface cleaning; Tail; Thermal resistance; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1985.22319
