DocumentCode
1102974
Title
IIB-7 rapid thermal annealing implant diffusion for 1000-Å source-drain junctions
Author
Davies, D.E.
Volume
32
Issue
11
fYear
1985
fDate
11/1/1985 12:00:00 AM
Firstpage
2533
Lastpage
2533
Keywords
Diodes; Implants; Optical arrays; Optical recording; Phased arrays; Pressing; Rapid thermal annealing; Semiconductor laser arrays; Solid state circuits; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1985.22321
Filename
1485067
Link To Document