DocumentCode

1103254

Title

IVB-1 electrical properties of thin oxides (80-90 Å) processed by a two-step oxidation treatment

Author

Bhattacharyya, A. ; Vorst, C.

Volume

32

Issue

11

fYear

1985

fDate

11/1/1985 12:00:00 AM

Firstpage

2542

Lastpage

2542

Keywords

Annealing; Argon; Breakdown voltage; Degradation; Dielectrics; Electron mobility; Laboratories; Oxidation; Temperature distribution; Voltage measurement;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1985.22346

Filename

1485092