Title :
Parasitic bipolar gain in fully depleted n-channel SOI MOSFET´s
Author :
Ploeg, Eric P Ver ; Nguyen, Cuong T. ; Wong, S. Simon ; Plummer, James D.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
fDate :
6/1/1994 12:00:00 AM
Abstract :
Fully depleted SOI MOSFET´s include an inherent parasitic lateral bipolar structure with a floating base. We present here the first complete physically based explanation of the bipolar gain mechanism, and its dependence on bias and technological parameters. A simple, one-dimensional physical model, with no fitting parameters, is constructed, and is shown to agree well with simulations and measurements performed on a new type of SOI MOSFET structure. It is shown that parameters which affect the gain, such as SOI layer thickness, body doping concentration and gate and drain voltages, do so primarily by affecting the concentration of holes in the body region. Thus, current gain falls dramatically with increasing drain voltage due to the associated impact ionization driven increase in the hole concentration. Gummel plots of this parasitic bipolar indicate an apparent ideality factor of 0.5 for the hole current, due to the body hole concentration´s dependence on drain voltage
Keywords :
carrier density; impact ionisation; insulated gate field effect transistors; semiconductor device models; semiconductor-insulator boundaries; silicon; SOI MOSFET; SOI layer thickness; Si; bias dependence; bipolar gain mechanism; body doping concentration; drain voltage; floating base; fully depleted n-channel device; gate voltage; hole concentration; ideality factor; impact ionization; one-dimensional physical model; parasitic bipolar gain; parasitic lateral bipolar structure; Body regions; Charge carrier processes; Doping; Feedback; Helium; Impact ionization; MOSFET circuits; Performance evaluation; Semiconductor process modeling; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on