Title :
Gas thermal conductivity sensor based on SAW
Author :
Anisimkin, V.I. ; Penza, M. ; Osipenko, V.A. ; Vasanelli, L.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
An uncoated surface acoustic wave (SAW) delay line integrated with a suitable film heater is used as a gas sensitive element based on thermal conductivity change. It detects concentrations from 0.1-100% of H/sub 2/, O/sub 2/, He, and Ar in N/sub 2/ in the temperature range from 20-150/spl deg/C. The value and sign of the SAW gas response are controlled by substrate material and reference gas.
Keywords :
gas sensors; surface acoustic wave delay lines; surface acoustic wave sensors; thermal conductivity; thermal conductivity measurement; thermal variables measurement; 20 to 150 C; Ar; H/sub 2/; He; N/sub 2/; O/sub 2/; SAW delay line; film heater; gas thermal conductivity sensor; surface acoustic waves; Acoustic sensors; Acoustic signal detection; Acoustic waves; Conductive films; Delay lines; Gas detectors; Surface acoustic waves; Thermal conductivity; Thermal sensors;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
