Title :
A modification on "An improved method to determine MOSFET channel length"
Author_Institution :
Motorola Inc., Phoenix, AZ
fDate :
3/1/1985 12:00:00 AM
Abstract :
A brief review of a recent paper [1] describing a method to electrically determine the effective channel length is presented. The method uses a simplifying approximation. By defining some new terms this application can be avoided leading to a new method. Finally, data is presented comparing the two methods for MOSFET´s clearly violating the approximation and exemplifying the general applicability of the new method.
Keywords :
DSL; Difference equations; Extrapolation; Intrusion detection; Laboratories; Least squares methods; MOSFET circuits; Surface resistance; Testing; Threshold voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1985.26062