Title :
Microwave performance of 0.25-µm gate length high electron mobility transistors
Author :
Mishra, U.K. ; Palmateer, S.C. ; Chao, P.C. ; Smith, P.M. ; Hwang, J.C.M.
Author_Institution :
General Electric Company, Syracuse, NY
fDate :
3/1/1985 12:00:00 AM
Abstract :
The performance of 0.25-µm gate length high electron mobility transistors (HEMT´s) is reported. Devices were fabricated on layers grown by MBE. One of the heterostructures had no undoped AlGaAS spacer layer (wafer A), whereas the other had a 40-Å spacer layer (wafer B). The maximum stable gain on both wafers was ∼ 12 dB at 18 GHz. The minimum noise figure measured was 0.60 dB at 8 GHz and 1.3 dB at 18 GHz. Wafer A yielded devices with a unity current gain cutoff frequency ftof 65 GHz whereas wafer B gave an ftof 70 GHz. These results can be attributed primarily to the high quality material, low parasitic resistance, and short gate length.
Keywords :
Cutoff frequency; Electrical resistance measurement; Etching; Fabrication; Gallium arsenide; HEMTs; MODFETs; Microwave devices; Molecular beam epitaxial growth; Noise figure;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1985.26074