In-situ preparation of superconducting Bi-Sr-Ca-Cu-O thin films by high pressure DC sputtering

Author

Lin, R.J. ; Wu, P.T.

Author_Institution

Mater. Res. Lab., Ind. Technol. Res. Inst., Hsinchu, Taiwan

Volume

27

Issue

2

fYear

1991

fDate

3/1/1991 12:00:00 AM

Firstpage

1560

Lastpage

1563

Abstract

Superconducting Bi-Sr-Ca-Cu-O films on (100) MgO substrates have been reproducibly prepared by the high-pressure DC sputtering process without further annealing treatment. The sputtering gas was Ar-50%O₂, and total gas pressure was 1.5 torr. The target was Bi₂Sr₂Ca_1.3Cu₂O_x composite made by solid-state reaction. The substrate temperatures were 600-750°C. The film thickness is 0.8-1.5 μm. The films consisted of highly c-oriented Bi₂Sr₂Ca₁Cu₂O_x or Bi₂Sr₂Cu₁O_x phase. The best superconducting properties of the films are T_c(onset)=93 K and T_c (R=0)=68 K. The detailed process and effect of processing parameters on superconductivities, phases, and surface morphologies of the films are discussed

Keywords

bismuth compounds; calcium compounds; high-temperature superconductors; sputtered coatings; strontium compounds; superconducting thin films; superconducting transition temperature; 0.8 to 1.5 micron; 600 to 750 degC; 68 K; 93 K; Bi-Sr-Ca-Cu-O; MgO; film thickness; high pressure DC sputtering; high temperature superconductor; surface morphologies; thin films; Annealing; Bismuth; Solid state circuits; Sputtering; Strontium; Substrates; Superconducting films; Superconducting thin films; Superconductivity; Temperature;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.133482

Filename

133482