Title :
Nb3Sn thin films made by RF magnetron sputtering process with a reacted Nb3Sn powder target
Author :
Agatsuma, Koh ; Tateishi, Hiroshi ; Arai, Kazuaki ; Saitoh, Takashi ; Nakagawa, Mikio
Author_Institution :
Electrotech. Lab., Ibaraki, Japan
fDate :
7/1/1996 12:00:00 AM
Abstract :
We have developed a high field pulsed superconductor with a high elastic modulus fiber for reinforcement called FRS (fiber reinforced superconductor). These fiber reinforced superconductors are formed by magnetron sputtering techniques of two opposed planar targets. In this process for Nb3Sn compound formation, a single phase material target is desirable to shorten the deposition process. We have succeeded in making a sputtering target which consists of Nb3Sn single phase material by powder metallurgy. Fiber reinforced superconductor of Nb3Sn on Ta fiber has been successfully fabricated with this target. An attempt has been made to form Nb3Sn film as grown on a heated substrate by this single phase target
Keywords :
X-ray diffraction; critical current density (superconductivity); magnetic susceptibility; multifilamentary superconductors; niobium alloys; powder metallurgy; sputter deposition; superconducting thin films; tin alloys; type II superconductors; Nb3Sn; Nb3Sn thin films; RF magnetron sputtering process; Ta; Ta fiber; deposition process; fiber reinforced superconductor; heated substrate; high elastic modulus fiber; high field pulsed superconductor; planar targets; powder metallurgy; reacted Nb3Sn powder target; single phase material target; Inorganic materials; Magnetic materials; Magnetoelasticity; Niobium-tin; Radio frequency; Sputtering; Superconducting films; Superconducting magnets; Superconducting materials; Superconducting thin films;
Journal_Title :
Magnetics, IEEE Transactions on
