DocumentCode
1104822
Title
A miniature high-power KrF laser excited with a capacitively coupled discharge
Author
Gerber, T. ; Bastiaens, H.M.J. ; Peters, P.J.M.
Author_Institution
Twente University of Technology, Enschede, Netherlands
Volume
21
Issue
3
fYear
1985
fDate
3/1/1985 12:00:00 AM
Firstpage
191
Lastpage
193
Abstract
A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO3 doorknob capacitors is described. The discharge volume of 1.4 cm3is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/l) in a 5.0 ns long pulse was achieved.
Keywords
Noble-gas lasers, excimer; Pulsed lasers; Boring; Capacitors; Circuits; Dielectrics; Electrodes; Gas lasers; Laser excitation; Optical coupling; Optical pulses; Voltage;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1985.1072636
Filename
1072636
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