Title :
A miniature high-power KrF laser excited with a capacitively coupled discharge
Author :
Gerber, T. ; Bastiaens, H.M.J. ; Peters, P.J.M.
Author_Institution :
Twente University of Technology, Enschede, Netherlands
fDate :
3/1/1985 12:00:00 AM
Abstract :
A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO3doorknob capacitors is described. The discharge volume of 1.4 cm3is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/l) in a 5.0 ns long pulse was achieved.
Keywords :
Noble-gas lasers, excimer; Pulsed lasers; Boring; Capacitors; Circuits; Dielectrics; Electrodes; Gas lasers; Laser excitation; Optical coupling; Optical pulses; Voltage;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1985.1072636
