• DocumentCode
    1104822
  • Title

    A miniature high-power KrF laser excited with a capacitively coupled discharge

  • Author

    Gerber, T. ; Bastiaens, H.M.J. ; Peters, P.J.M.

  • Author_Institution
    Twente University of Technology, Enschede, Netherlands
  • Volume
    21
  • Issue
    3
  • fYear
    1985
  • fDate
    3/1/1985 12:00:00 AM
  • Firstpage
    191
  • Lastpage
    193
  • Abstract
    A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO3doorknob capacitors is described. The discharge volume of 1.4 cm3is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/l) in a 5.0 ns long pulse was achieved.
  • Keywords
    Noble-gas lasers, excimer; Pulsed lasers; Boring; Capacitors; Circuits; Dielectrics; Electrodes; Gas lasers; Laser excitation; Optical coupling; Optical pulses; Voltage;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1985.1072636
  • Filename
    1072636