Title :
YBa2Cu3O7-δ/insulator multi-layers for crossover fabrication
Author :
Beall, J.A. ; Cromar, M.W. ; Harvey, T.E. ; Johansson, M.E. ; Ono, R.H. ; Reintsema, C.D. ; Rudman, D.A. ; Asher, S.E. ; Nelson, A.J. ; Swartzlander, A.B.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
fDate :
3/1/1991 12:00:00 AM
Abstract :
The development of thin-film dielectrics compatible with the epitaxial growth of YBa2Cu3O7-δ (YBCO) is crucial to the fabrication of multilayer device and circuit structures. The authors investigated the YBCO/SrTiO3 (STO) system by fabricating YBCO/STO bilayers and simple YBCO/STO/YBCO crossover structures. The thin films were deposited in situ by pulsed-laser deposition and analyzed using X-ray diffraction and scanning electron microscopy. The film interfaces were characterized by secondary ion mass spectrometry (SIMS) depth profiling. The authors have developed photolithographic and wet-etching processes for patterning the crossovers which are compatible with these materials. The crossover structures were characterized by resistance and insulator pinhole density as well as by the superconducting properties of the patterned top and bottom YBCO electrodes (critical temperature, Tc, and critical current density, Jc). Using SrTiO3 as the insulating layer, crossovers were made with good isolation between layers (>100 MΩ) and high Jc even in the top electrode (Jc(76 K)>105 A/cm2)
Keywords :
X-ray diffraction examination of materials; barium compounds; critical current density (superconductivity); high-temperature superconductors; secondary ion mass spectra; superconducting epitaxial layers; superconducting transition temperature; vapour deposited coatings; yttrium compounds; SrTiO3; X-ray diffraction; YBa2Cu3O7-δ; YBa2Cu3O7-δ/insulator multi-layers; critical current density; critical temperature; crossover fabrication; depth profiling; epitaxial growth; high temperature superconductor; insulator pinhole density; photolithographic; pulsed-laser deposition; resistance; scanning electron microscopy; secondary ion mass spectrometry; superconducting properties; thin-film dielectrics; wet-etching; Dielectric devices; Dielectric thin films; Electrodes; Epitaxial growth; Fabrication; Insulation; Superconducting films; Thin film circuits; Thin film devices; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
