• DocumentCode
    1105447
  • Title

    Effect of selective tungsten as a polysilicon shunt on CMOS ring-oscillator performance

  • Author

    Metz, W.A. ; Szluk, N.J. ; Miller, G.W. ; Hayworth, H.O.

  • Author_Institution
    NCR Corporation, Fort Collins, CO
  • Volume
    6
  • Issue
    7
  • fYear
    1985
  • fDate
    7/1/1985 12:00:00 AM
  • Firstpage
    372
  • Lastpage
    374
  • Abstract
    Selective tungsten is applied as a polysilicon shunt to CMOS ring oscillators specifically designed to be interconnect limited. The tungsten shunted ring oscillators operate at a frequency almost twice that of nonshunted oscillators. Shunting of source/drains as well as gates leads to further performance enhancements. Similar improvements are demonstrated for VLSI circuits.
  • Keywords
    CMOS technology; Circuit optimization; Fabrication; Frequency; Histograms; Integrated circuit interconnections; Production; Ring oscillators; Silicon; Tungsten;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1985.26158
  • Filename
    1485311