Title :
High Tc S-I-S and S-N-S structures using RF sputtered films
Author :
Drehman, A.J. ; MacDonald, B.L. ; Andrews, R.J. ; Tedrow, P.M.
Author_Institution :
Rome Air Dev. Center, Hanscom AFB, MA, USA
fDate :
3/1/1991 12:00:00 AM
Abstract :
Crosses consisting of 150-μm-wide lines of Y-Ba-Cu-O separated by layers of yttrium-stabilized zirconia about 30-nm thick have been formed using RF diode sputtering and wet chemical patterning. The resistivity of the insulator has been measured as a function of temperature and was found to increase exponentially as the temperature was lowered, reaching values of 109 Ω-cm at 225 K. S-N-S (superconductor/normal metal/superconductor) structures have been fabricated from these crosses by ion-milling a 100-μm-diameter hole through the junction region and depositing Au in the resulting via. After annealing in O2 at 450°C, the gold supports a supercurrent of up to 1.5 mA at 4.2 K, corresponding to a current density of about 3×103 A/cm3
Keywords :
barium compounds; high-temperature superconductors; sputtered coatings; superconducting junction devices; superconducting thin films; yttrium compounds; (superconductor/normal metal/superconductor) structures; RF sputtered films; YBaCuO-Au-YBaCuO; YBaCuO-ZrO2Y2O3-YBaCuO; high temperature superconductor; insulator; resistivity; wet chemical patterning; Chemicals; Conductivity; Diodes; Gold; Insulation; Josephson junctions; Radio frequency; Sputtering; Temperature; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
