DocumentCode :
1106446
Title :
Electrification of polymer surface caused by sliding ultrapure water
Author :
Yatsuzuka, Kyoko ; Higashiyama, Yoshio ; Asano, Kazutoshi
Author_Institution :
Dept. of Electr. & Inf. Eng., Yamagata Univ., Yonezawa, Japan
Volume :
32
Issue :
4
fYear :
1996
Firstpage :
825
Lastpage :
831
Abstract :
It has been thought that the conductivity of pure water is high enough to neglect the streaming electrification. However, with the recent advancement of semiconductor industries, ultrapure water appeared to cause electrification problems at the washing and the rinsing processes of semiconductor wafers. The investigation on the electrification phenomenon of polymer (PTFE) surface with ultrapure water is described in this article. Water droplets are always charged positively after sliding on the PTFE surface, and the surface potential on PTFE is mostly negative and varies along the droplet path becoming positive downstream. As the conductivity of water becomes closer to that of ideal water, the amount of droplet charge increases drastically. This electrification phenomenon is also enhanced by decreasing the thickness of the PTFE plate. It suggests that the Coulombic force between the charge on the PTFE surface and the mirror image charge is an important factor. We have proposed a model which is based on the electric double layer similar to conventional streaming electrification for insulating liquid, assuming that the charged droplet leaves the excess positive charge on the polymer surface
Keywords :
drops; electrical conductivity; electronics industry; polymers; surface charging; surface potential; water; Coulombic force; PTFE surface; conductivity; droplet charge; electric double layer; insulating liquid; mirror image charge; polymer surface electrification; rinsing; semiconductor wafers; sliding ultrapure water; streaming electrification; surface potential; washing; water droplets; Conductivity; Dielectric liquids; Dielectrics and electrical insulation; Industry Applications Society; Mirrors; Petroleum; Plastic insulation; Polymers; Streaming media; Surface discharges;
fLanguage :
English
Journal_Title :
Industry Applications, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-9994
Type :
jour
DOI :
10.1109/28.511638
Filename :
511638
Link To Document :
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