Compact Spreading Resistance Model for Rectangular Contacts on Uniform and Epitaxial Substrates

We present a compact analytical spreading resistance model for substrate noise coupling analysis. The model can handle rectangular contacts on uniform substrates of finite thickness with a grounded backplane. In contrast to previously published compact models, the model does not require extraction of fitting parameters. The model is also scalable with the resistivity and thickness of the substrate, and with the contact size. The model is verified with extensive finite-element calculations, and the accuracy is shown to be good. We also show that the model can predict the spreading resistance on epitaxial substrates.