A new fusible-type programmable element composed of Aluminum and polysilicon

This paper describes the structure and programming characteristics of newly developed fusible-type programmable element called an Al-Si fuse. The Al-Si fuse, formed by an aluminum pattern formation process using the substitution reaction of aluminum for polysilicon (APSP) is made up of a polysilicon component and an aluminum component. The programming characteristics of the Al-Si fuse indicate bias polarity dependence. In the programming mode in which the substituted aluminum component is positively biased, programming characteristics are determined by the current and not by the power. Furthermore, the programming current is reduced to one-half of that for conventional polysilicon fuse. The programming current and voltage for a sample having a 3-µm width and 160-nm thickness are reduced to 5.5 mA and 3.2 v.