Microwave SQUID Multiplexer for TES Readout

Resonant frequencies and SQUID inductances L_S in a microwave SQUID multiplexer are studied for the purpose of reliable design applicable for a future large-format array of transition edge sensors (TESs). The key element of the multiplexer chip is a quarter-wave-length resonator terminated by a dissipationless rf SQUID connected to TES. For the resonator, we found that a small correction to the effective length of the resonators made the designed resonant frequencies fit the experimental one over the whole readout band of 4-8 GHz covered by our cryogenic amplifier. We also found that microstrip-type SQUIDs with vertical loops are suitable for accurate design of small inductance L_S <; 10<; pH to operate the rf SQUID in dissipationless regime. Based on these well-designed resonators and SQUIDs, we have successfully demonstrated the multiplexing of three pulsed signals with 1-ms width and spacing given at the input ports of three SQUIDs. The equivalent noise current refer to the SQUID input is not dominated by SQUIDs and estimated to be 200-270 pA/ √Hz, whose improvement approach is quantitatively discussed.