Title :
Deposition and piezoelectric characteristics of ZnO films by using an ECR sputtering system
Author :
Kadota, Michio ; Kasanami, Toru ; Minakata, Makoto
Author_Institution :
Murata Manuf. Co. Ltd., Kyoto, Japan
fDate :
7/1/1994 12:00:00 AM
Abstract :
Piezoelectric properties of ZnO films, were investigated by using an Electron Cyclotron Resonance (ECR) sputtering system. It was confirmed that this system was capable of depositing a ZnO film with a large specific resistance, and good c-axis orientation on an interdigital transducer (IDT)/glass substrate at a low temperature (less than 200/spl deg/C) and in a low gas pressure (/spl sim/10/sup -4/ torr). Furthermore, these ZnO films exhibited excellent SAW characteristics (insertion losses) and effective electromechanical coupling factors (k/sub eff/) compared with ZnO films deposited by a conventional RF magnetron sputtering system. Further, this ECR sputtering system was capable of depositing a ZnO film, without heating the substrate, that was capable of propagating a Rayleigh SAW at 700 MHz for the first time.<>
Keywords :
losses; piezoelectric thin films; sputter deposition; sputtered coatings; surface acoustic waves; ultrasonic propagation; zinc compounds; 1*10/sup -4/ torr; 200 C; 700 MHz; ECR sputtering system; IDT/glass substrate; Rayleigh SAW; SAW characteristics; ZnO; ZnO films; c-axis orientation; electromechanical coupling factors; electron cyclotron resonance; insertion losses; interdigital transducer; piezoelectric characteristics; Cyclotrons; Electrons; Glass; Piezoelectric films; Piezoelectric transducers; Resonance; Sputtering; Substrates; Surface acoustic waves; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
