An InP/GaInAsP/GaInAs avalanche photodiode (APD) with separate absorption and multiplication (SAM) regions has been designed taking into account the excess noise generated in GaInAsP and GaInAs. The multiplication factor dependence of the excess noise factor

has been calculated using realistic electron and hole ionization rates in InP, GaInAsP, and GaInAs, assuming that the avalanche multiplication occurs not only in InP but in GaInAsP and GaInAs. The calculated

values have been compared to the experimental ones measured on a planar-type InP/GaInAsP/GaInAs APD for illumination at a wavelength of 1.3 μm. It has been found the the calculated excess noise agrees very well with the experimental measurements. The limited ranges of device parameters in which the conditions of minimal excess noise, tunneling current, and charge pile-up are satisfied have been obtained. We conclude that the excess noise generated in GaInAsP and GaInAs should be considered in a practical device design.