DocumentCode
1109310
Title
On-wafer impedance measurement on lossy substrates
Author
Williams, Dylan F. ; Marks, Roger B.
Author_Institution
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Volume
4
Issue
6
fYear
1994
fDate
6/1/1994 12:00:00 AM
Firstpage
175
Lastpage
176
Abstract
This paper introduces a new method for measuring impedance parameters in transmission lines fabricated on lossy or dispersive dielectrics. The method, which uses an independent calibration to provide an impedance reference, compares well with conventional techniques when applied to lossless substrates. The effectiveness of the technique is illustrated for resistors fabricated on lossy silicon substrates.<>
Keywords
calibration; electric impedance measurement; microwave integrated circuits; microwave measurement; strip line components; Si; Si substrates; dispersive dielectrics; impedance reference; independent calibration; lossy substrates; onwafer impedance measurement; resistors; transmission lines; Calibration; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Dielectric substrates; Dispersion; Impedance measurement; Loss measurement; Propagation losses; Transmission line measurements;
fLanguage
English
Journal_Title
Microwave and Guided Wave Letters, IEEE
Publisher
ieee
ISSN
1051-8207
Type
jour
DOI
10.1109/75.294283
Filename
294283
Link To Document