DocumentCode
1109583
Title
A Poisson C-V profiler
Author
Blacksin, Jeffrey M.
Author_Institution
Digital Equipment Corporation, Hudson, MA
Volume
33
Issue
9
fYear
1986
fDate
9/1/1986 12:00:00 AM
Firstpage
1387
Lastpage
1389
Abstract
The determination of doping profiles from MOS 
curves has previously been calculated by the use of the depletion approximation and other correction techniques. A method is presented based upon solving Poisson\´s equation for the charge distribution of an assumed doping profile, calculating the capacitance from that doping profile, and allowing an iterative calculation of the doping profile to produce the desired curve.
curves has previously been calculated by the use of the depletion approximation and other correction techniques. A method is presented based upon solving Poisson\´s equation for the charge distribution of an assumed doping profile, calculating the capacitance from that doping profile, and allowing an iterative calculation of the doping profile to produce the desired curve.Keywords
Capacitance-voltage characteristics; Doping profiles; Electron devices; High speed optical techniques; Optical fiber communication; Optical fiber networks; Optical receivers; Photodiodes; Poisson equations; Pulse measurements;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1986.22676
Filename
1485893
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