Title :
Influence of finite metal overlayer resistance on the evaluation of contact resistivity
Author :
Kovacs, Balazs ; Mojzes, I.
Author_Institution :
Hungarian Academy of Sciences, Budapest, Ujpest, Hungary
fDate :
9/1/1986 12:00:00 AM
Abstract :
To determine contact parameters, TLM methods are widely used. Their general usage assumes the sheet resistance of metal overlayer to be zero. This work shows the error obtained by accepting this assumption. Computer modeling was carried out to determine the deviation caused by this assumption.
Keywords :
Computer errors; Conductivity; Contact resistance; Electrical resistance measurement; Electron devices; Equations; Numerical models; Physics; Transmission line measurements; Transmission line theory;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22683
