Title :
IIB-3 a self-aligned oxygen-implanted SOI (SALOX SOI) technology
fDate :
11/1/1986 12:00:00 AM
Keywords :
Annealing; Circuit synthesis; Circuit testing; Contracts; Degradation; Implants; Isolation technology; Protection; Substrates; Surface emitting lasers;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22767
