DocumentCode

1110623

Title

IIB-8 SOI edge parasitics and their couplings

Author

Chen, Chiao-En

Volume

33

Issue

11

fYear

1986

fDate

11/1/1986 12:00:00 AM

Firstpage

1843

Lastpage

1843

Keywords

Amorphous materials; Annealing; Crystallization; Doping; Fabrication; Impurities; Leakage current; Silicon on insulator technology; Solids; Substrates;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1986.22771

Filename

1485988