Title :
IIIB-2 The fabrication submicrometer MOSFET´s using laser doping
Author :
Bezjian, K. ; Simon, Terry W. ; Magee, T.
fDate :
11/1/1986 12:00:00 AM
Keywords :
Boron; Doping; Electron devices; Gas lasers; Implants; Laser beams; MOSFETs; Optical device fabrication; Optical pulses; Silicon;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22782
