Title :
IIIB-6 the dependence of MOSFET output resistance on drain doping profiles
fDate :
11/1/1986 12:00:00 AM
Keywords :
CMOS process; Circuit simulation; Doping profiles; Integrated circuit interconnections; MOSFET circuits; Semiconductor process modeling; Silicides; Tin; Titanium; Transconductance;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22784