DocumentCode
1110775
Title
IIIB-5 recessed Silo—A submicrometer VLSI isolation technology
Author
Hui, John ; Voorde, P.V. ; Moll, Jonas
Volume
33
Issue
11
fYear
1986
fDate
11/1/1986 12:00:00 AM
Firstpage
1848
Lastpage
1848
Keywords
Anisotropic magnetoresistance; Etching; Isolation technology; Laboratories; Lithography; MOSFET circuits; Oxidation; Silicon; Transconductance; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1986.22785
Filename
1486002
Link To Document