DocumentCode :
1110826
Title :
IVA-2 in situ mobility profiling of short channel field-effect transistors using the Hall current technique
Author :
Andreou, A.G. ; Westgate, Charles R. ; Thoma
Volume :
33
Issue :
11
fYear :
1986
fDate :
11/1/1986 12:00:00 AM
Firstpage :
1850
Lastpage :
1850
Keywords :
Computer science; Current measurement; FETs; Gallium arsenide; Geometry; Hall effect; Magnetic field measurement; Magnetic materials; Silicon; Transistors;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1986.22790
Filename :
1486007
Link To Document :
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