Title :
VA-5 Monolithic integration of GaAs/AlGaAs double-heterostructure LED´s and Si MOSFET´s
Author :
Choi, H.K. ; Turner, G.W.
fDate :
11/1/1986 12:00:00 AM
Keywords :
Electron devices; Fabrication; Gallium arsenide; Light emitting diodes; MOSFET circuits; Metallization; Monolithic integrated circuits; Sputter etching; Substrates; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22807
