DocumentCode :
1111050
Title :
VA-6 sputtered Si masks for GaAs etching and diffusion
Author :
Wu, X.S. ; Omura, E. ; Huang, Tzu-Chi ; Coldren, Larry A. ; Merz, J.L.
Volume :
33
Issue :
11
fYear :
1986
fDate :
11/1/1986 12:00:00 AM
Firstpage :
1858
Lastpage :
1858
Keywords :
Adhesives; Amorphous materials; Electrons; Gallium arsenide; Semiconductor films; Spontaneous emission; Sputter etching; Temperature; Wet etching; Zinc;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1986.22811
Filename :
1486028
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1111050
