DocumentCode

1111127

Title

VB-6 a laser-induced ohmic link for wafer-scale integration in standard CMOS processing

Author

Chapman, Glenn H. ; Mathur, B. ; Raffel, J.I.

Volume

33

Issue

11

fYear

1986

fDate

11/1/1986 12:00:00 AM

Firstpage

1861

Lastpage

1861

Keywords

Aluminum; CMOS process; Diodes; Electrons; Equations; Laser beams; Optical pulses; Space vector pulse width modulation; Testing; Wafer scale integration;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1986.22818

Filename

1486035