Title :
A Microfluidic Packaging Technique for Lab-on-Chip Applications
Author :
Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad ; Therriault, Daniel
Author_Institution :
Dept. of Electr. Eng., Ecole Polytech. de Montreal, Montreal, QC
fDate :
5/1/2009 12:00:00 AM
Abstract :
In this paper, we address the often-neglected challenges of microfluidic packaging for biochemical sensors by proposing an efficient direct-write microfluidic packaging procedure. This low-cost procedure is performed through a programmable dispensing system right after a routine electronic packaging process. In order to prove the concept, the simulation, fabrication and chemical testing results of implemented hybrid system incorporating microelectronics and microfluidics are also presented and discussed.
Keywords :
bioMEMS; biochemistry; biosensors; chemical sensors; electronics packaging; lab-on-a-chip; microfluidics; microsensors; biochemical sensor; electronic packaging process; lab-on-chip application; microfluidic packaging technique; programmable dispensing system; Complementary metal–oxide–semiconductor (CMOS); direct-write fabrication process; integrated capacitive sensor; lab-on-chip; microfluidic packaging;
Journal_Title :
Advanced Packaging, IEEE Transactions on
DOI :
10.1109/TADVP.2008.920655