Title :
Lateral insulated gate transistors with improved latching characteristics
Author :
Robinson, Andrew L. ; Pattanayak, Deva N. ; Adler, Michael S. ; Baliga, B.Jayant ; Wildi, Eric J.
Author_Institution :
University of Michigan, Ann Arbor, MI
fDate :
2/1/1986 12:00:00 AM
Abstract :
Lateral insulated gate transistors (LIGT´s) were fabricated to study their applicability for power integrated circuits. Three independent techniques for improving LIGT latching current are described in this paper. Devices that latch at 510 A/cm2have been fabricated; devices that current-limit at 475 A/cm2without latching have also been demonstrated.
Keywords :
Anodes; Cathodes; Current density; Fabrication; Helium; Insulation; Latches; MOSFETs; Power integrated circuits; Substrates;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1986.26294