DocumentCode
1112246
Title
Enhanced carrier lifetime and diffusion length in GaAs by strained-layer MOCVD
Author
Beneking, H. ; Narozny, P. ; Roentgen, P. ; Yoshida, M.
Author_Institution
Aachen Technical University, Aachen, Federal Republic of Germany
Volume
7
Issue
2
fYear
1986
fDate
2/1/1986 12:00:00 AM
Firstpage
101
Lastpage
103
Abstract
It is shown that by MOCVD growth of a single strained GaAs:In layer, the quality of epitaxial GaAs material can be remarkably enhanced. This is demonstrated with respect to lifetimes and diffusion lengths of minority carriers. This technique permits an improvement of the quality of electronic and optoelectronic bipolar devices.
Keywords
Atomic layer deposition; Charge carrier lifetime; Doping; Epitaxial layers; Gallium arsenide; Lattices; MOCVD; Schottky diodes; Semiconductor diodes; Substrates;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1986.26308
Filename
1486131
Link To Document